12
5
1
14
AZ 1529
BASES/CORROSIVES
TMAH, KOH
AZ 400K 1:4
10
AZ Developer 1:1
BASES/CORROSIVES
NH4OH, NaOH, etc.
AZ P4620
SU-8 2050
Anisole
SURFACTANTS
Misc. chemicals
9
11
SU-8 Developer
Aluminum etch
FLAMMABLE
Photoresists
EBL resists
FLAMMABLE
Organic solvents
Sulfuric acid
AZ 5214 E
ZEP 520A
8
ACIDS/CORROSIVES
HF, BOE, CaCl2
Calcium chloride
Acetone
KMPR 1010
Hover over stocked chemical names or cabinets to show storage locations.
7
HF (49%)
SRD
Drawers
Window
6
Wet Deck 2A
16
Gold etch
13
Carts
PMMA 950k
PMMA 495k
FLAMMABLE
EBL resists
ACIDS/CORROSIVES
Sulfuric acid
Soap solution
OXIDIZER/CORROSIVE
Hydrogen peroxide
ACIDS/CORROSIVES
Metal etchants
TMAH
LOR 5B
Electra 92
Nitric acid
MIBK
Pentane
FLAMMABLE
EBL resists (resale)
PDMS kit
Phosphoric acid
MIBK:IPA 1:3
KOH
MIBK:IPA 1:1
IPA
AZ 1512
Potassium hydroxide
Photomask cleaner
HSQ
Remover PG
PGMEA
Wet Deck 2B (Piranha)
Wet Deck 1A
15
Wet Deck 1B
MF-CD-26
FLAMMABLE
EBL resists, PDMS,
organic developers
BOE (10:1)
BASES/CORROSIVES
Aqueous developers
MF-319
FLAMMABLE
Acetone, IPA
ZEP-A
Hydrochloric acid
ZED-N50
Hydrofluoric acid
Silanizing agent
Chrome etch
FLAMMABLE
Photoresists
Hydrogen peroxide
Isopropanol
Cleanroom chemical storage map
4
3
2
Bottles